SiC fine powder for SiC porous ceramic vacuum chuck
SiC porous ceramics has excellent advantage than other ceramics. Such as high strength, excellent corrosion resistance, high temperature resistance, high thermal conductivity, low thermal expansion coefficient, good thermal shock resistance. So it is an ideal vacuum chuck ceramic in semiconductor industry for bonding, cutting,tape installation, polishing,etc. Silicon carbide fine powder is just the raw material for SiC porous ceramic vacuum chuck.