Green silicon carbide Micron for polishing PZT material

Green silicon carbide micron is a kind of non-metallic abrasive with high hardness, high mechanical strength. It can make an aggressive grinding. Green silicon carbide has great advantages for the grinding of PZT (piezoelectric ceramic) materials.

PZT is a functional ceramic material that converts mechanical energy and electrical energy into each other. They are widely used in optics, semiconductors, instruments, and other fields. However, ceramics are brittle and difficult to be processed by piezoelectricity. In the later surface treatment stage of PTZ ceramics, the double-sided polishing machine is used to grind and polish the PZT wafer. Generally, the surface treatment of PZT, such as graded roughening and grinding, is carried out with green silicon carbide 50 microns, 40 microns, 20 microns, and 14 microns. After roughening, the wafer surface is uniform without scratches, and the roughness can reach 1.2-1.5um. In the stage of fine polishing and fine grinding, white corundum 14 microns,7 microns, and 5-micron powders are selected for fine grinding. The roughness of the product after polishing is less than 50nm.

In order to achieve the grinding effect of polishing without a scratch, the particle size of green silicon carbide abrasive needs to be strictly controlled. In this situation, the particle size should be the same as possible and the particle size range should be narrow. If there are large particles, it is easy to damage the ceramic surface. If there are many fine particles, it will reduce the grinding efficiency. Therefore, the green silicon carbide powder graded by water washing overflow is the appropriate abrasive.