SiC fine powder for SiC porous ceramic vacuum chuck
SiC porous ceramics has excellent advantage than other ceramics. Such as high strength, excellent corrosion resistance, high temperature resistance, high thermal conductivity, low thermal expansion coefficient, good thermal shock resistance. So it is an ideal vacuum chuck ceramic in semiconductor industry for bonding, cutting,tape installation, polishing,etc. SiC fine powder is just the raw material for SiC porous ceramic vacuum chuck.
The advantages of black silicon carbide fine powder for SiC porous ceramic vacuum chuck are:
1. Wear-resistant and high-temperature resistant. It can meet the needs of long-term continuous operation of the chuck.
2. Low thermal expansion rate, preventing failures caused by volume deformation.
3. Strong corrosion resistance. Silicon carbide fine powder doesn’t react with the adsorption material under high temperature conditions.
4. Strong chemical stability, no corrosive gas or short circuit will be generated in a vacuum environment.
5. The particle size of silicon carbide micropowder is controllable. It is suitable for the production of ultra-thin silicon carbide ceramic vacuum chuck.
6. After chemical cleaning and water washing, the content and content of black silicon carbide ultra-fine powder are very low.
